Atlas

Advanced 300mm Metrology System

◆200 or 300mm wafer

◆200mm Open cassette or 300mm Foup

◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm

◆DUV-NIR Spectroscopic Ellipsometry (SE)from 190 to 1000 nm

◆T, n and k meaurementson single and multi-layer film stacks

◆Windows NT or XP operation system for real-time, multi-tasking operations

◆N2000 user interface compliant to SEMI standard(E95-0200)