Nanospec8000

Advanced 200mm Metrology System

◆75，100，125，150 or 200mm wafer

◆Open cassette or 200mm SMIF

◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm

◆T, n and k measurement single and multi-layer film stacks

◆Windows NT operation system for real-time, multi-tasking operations

◆N2000 user interface compliant to SEMI standard(E95-0200)