Nanospec9100
Nanospec9100
Advanced 200mm Metrology System
◆75,100,125,150 or 200mm wafer
◆Open cassette
◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm
◆DUV-NIR Spectroscopic Ellipsometry (SE)from 190 to 1000 nm
◆T, n and k meaurementson single and multi-layer film stacks
◆XP operation system for real-time, multi-tasking operations
◆N2000 user interface compliant to SEMI standard(E95-0200)
上一篇: Therma Wave OP2600 | 下一篇: NANOSPEC8000 |