NANOSPEC8000
发布时间:2019-02-14   浏览:464 views   调整大小: 16px  14px  12px

Nanospec8000

Advanced 200mm Metrology System

 

◆75,100,125,150 or 200mm wafer

◆Open cassette

◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm

◆T, n and k measurement single and multi-layer film stacks

◆Windows XP operation system for real-time, multi-tasking operations

◆N2000 user interface compliant to SEMI standard(E95-0200)

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