NANOSPEC8000
Nanospec8000
Advanced 200mm Metrology System
◆75,100,125,150 or 200mm wafer
◆Open cassette
◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm
◆T, n and k measurement single and multi-layer film stacks
◆Windows XP operation system for real-time, multi-tasking operations
◆N2000 user interface compliant to SEMI standard(E95-0200)
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