NANOSPEC9300
Nanospec9300
Advanced 300mm Metrology System
◆200mm and 300mm wafer
◆200mm and 300mm load port
◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm
◆T, n and k meaurementson single and multi-layer film stacks
◆Windows XP operation system for real-time, multi-tasking operations
◆N2000 user interface compliant to SEMI standard(E95-0200
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