Nanospec9300

Advanced 300mm Metrology System

◆200mm and 300mm wafer

◆200mm and 300mm load port

◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm

◆T, n and k meaurementson single and multi-layer film stacks

◆Windows XP operation system for real-time, multi-tasking operations

◆N2000 user interface compliant to SEMI standard(E95-0200