9010B
Integrated Metrology

Optical CD & Film Analysis System

The 9010B Series is the first integrated metrology tool to combine two measurement technologies – ultra violet optical critical dimension (OCD) using polarized spectroscopic reflectometry, and films measurements using deep ultra violet (DUV) spectroscopic reflectometry. The system performs thin film and film stack thickness measurements on pads as well as oxide, nitride and trench profile measurements on arrays. The combined technologies provide a complete measurement solution over the entire range of measurement requirements for each process step. This complete metrology capability is ideally suited for CMP applications, including dielectric, copper, tungsten and, poly-silicon.