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Nanospec 9200Nanospec9200Advanced 200mm Metrology System
◆125，150 or 200mm wafer ◆Open cassette or 200mm SMIF ◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm ◆T, n and k meaurementson single and multi-layer film stacks ◆Windows NT or XP operation system for real-time, multi-tasking operations ◆N2000 user interface compliant to SEMI standard(E95-0200) |
