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Nano AtlasAtlasAdvanced 300mm Metrology System
◆200 or 300mm wafer ◆200mm Open cassette or 300mm Foup ◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm ◆DUV-NIR Spectroscopic Ellipsometry (SE)from 190 to 1000 nm ◆T, n and k meaurementson single and multi-layer film stacks ◆Windows NT or XP operation system for real-time, multi-tasking operations ◆N2000 user interface compliant to SEMI standard(E95-0200) |
