|
Nanospec 9100Nanospec9100Advanced 200mm Metrology System
◆75，100，125，150 or 200mm wafer ◆Open cassette or 200mm SMIF ◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm ◆DUV-NIR Spectroscopic Ellipsometry (SE)from 190 to 1000 nm ◆T, n and k meaurementson single and multi-layer film stacks ◆Windows NT or XP operation system for real-time, multi-tasking operations ◆N2000 user interface compliant to SEMI standard(E95-0200) |
