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Nanospec 9300SENanospec 9300Advanced 200/300mm Thickness Metrology System◆200 or 300mm wafer ◆Open cassette or 300mm Foup ◆DUV-Vsible Spectroscopic Reflectometry(SR) from 190 to 780 nm ◆T, n and k meaurementson single and multi-layer film stacks ◆Windows NT or XP operation system for real-time, multi-tasking operations ◆N2000 user interface compliant to SEMI standard(E95-0200) 
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